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X線光学と微細加工技術
X-ray optics and micro fabrication
X線リソグラフィを用いた超微細加工技術 / LIGA high-precision structures

タルボ干渉計向けの回折格子構造
X-ray grating structures for Talbot interferometer

X線複合屈折レンズ,CRL (2次元集光タイプ)
Compound refractive lens for X-ray 2D focusing

LIGA微細加工技術の応用例

ドイツのカールスルーエ技術研究所/工科大学(KIT)とスピンオフ企業のmicroworks GmbHは,金属とポリマーの微細構造体を高精度,高アスペクト比で製造します。高深度X線リソグラフィと電鋳(めっき)による超微細加工技術はLIGAプロセスと呼ばれ,X線光学(X線レンズ,X線回折格子),宇宙物理,医療機器,非破壊検査にて応用されている他,製造業向けの精密部品としても使用されています。

KIT/IMT and microworks GmbH are two of the world's top authorities in the fabrication of high aspect ratio polymer and metal structures using deep X-ray lithography and electroplating techniques. These techniques, called LIGA Process, are applied in X-ray optics, astrophysics, medical instrumentation, and non-destructive testing. LIGA Process is also employed to manufacture micro metal gears and high aspect ratio apertures for optical applications.

発表事例 / Publication list

アパーチャ,コリメータ等 (X線天文分野) / Apertures, collimators for X-ray astrophysics [microworks GmbH]


The Micro Solar Flare Apparutus (MiSolFA) Instrument Concept, Erica Lastufka et al., Advances in Space Research, Volume 66, Issue 1, 2020
「宇宙X線観測用SOIピクセル検出器内部における電荷雲形状の測定」,児嶌優一,平賀純子,鶴剛 20p-B301-3, The 65th JSAP Spring Meeting, 2018 (応用物理学会,2018年春)
Subpixel response of SOI pixel sensor for X-ray astronomy with pinned depleted diode: first result from mesh experiment. K Kayama et al., The 9th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (PIXEL 2018)
「メッシュ実験による次世代X線天文用SOIピクセル検出器のサブピクセル性能の研究」,佳山一帆 京都大学大学院 修士論文 2020年3月

X線回折格子(タルボ干渉計) / X-ray gratings for Talbot interferometry [microworks GmbH, KIT/IMT]


[心臓血管外科疾患の微細構造解析]
位相差X線CT法を用いた心臓大血管の構造研究,築部卓郎 他 / Cardiovascular structure analyzing research using synchrotron-based phase-contrast tomography. T Tsukbe et al., 日本放射光学会誌 Vol. 34, No.1/Jan. 2021
[肺の暗視野像]
X-ray dark-field imaging of the human lung - A feasibility study on a deceased body. K Willer et al., PLoS One. 2018; 13(9): e0204565
[大型動物の自然気胸の暗視野像]
Depiction of pneumothoraces in a large animal model using x-ray dark-field radiography. K Hellbach, A Baehr, F De Marco et al., Sci Rep 8, 2602 (2018)
[ヒトサイズ試料の低線量撮像]
A preclinical Talbot-Lau prototype for x‐ray dark‐field imaging of human‐sized objects. C Hauke et al., Med. Phys. 45 (6), June 2018

[非破壊検査向けの位相イメージングスキャナ]
Laboratory-based X-ray phase-imaging scanner using Talbot-Lau interferometer for non-destructive testing. Shivaji Bachche et al., Scientific Reports volume 7, Article number: 6711 (2017)
[非破壊検査向けの位相イメージングスキャナ,大きなFOV]
X-ray phase-imaging scanner with tiled bent gratings for large-field-of-view nondestructive testing. M Kageyama et al., NDT and E International 105 (2019) 19-24
[産業界向けアプリケーション]
System design and evaluation of a compact and high energy X-ray Talbot-Lau grating interferometer for industrial applications. Lee, S., Oh, O., Kim, Y. et al., J. Korean Phys. Soc. 73, 1827-1833 (2018)
[炭素繊維強化プラスチックのµCT撮像]
Multi-modal Talbot-Lau grating interferometer XCT data for the characterization of carbon fibre reinforced polymers with metal components. C Gusenbauer et al., Conference on Industrial Computed Tomography (iCT) 2017

[X線天文学]
Sub-arcsecond imaging with multi-image X-ray interferometer module (MIXIM) for very small satellite. Kiyoshi Hayashida et al., Proc. of SPIE Vol. 10699 106990U-1
サブ秒角撮像を目指すX線多重像干渉計MIXIMの基礎開発,川端智樹, 大阪大学大学院 修士論文,2018年2月
Sub-arcsecond to micro-arcsecond resolution X-ray imaging of SMBH with a novel method MIXIM, Kiyoshi Hayashida et al., AGN Jet Workshop, 2020

X線レンズ(複合屈折レンズ,CRL) / X-ray compound refractive lenses [KIT/IMT]


[BL03XU] Large apparent internal deformation of carbon fibres under tension observed by in-situ microbeam small-angle X-ray scattering. H Okuda et al., Carbon 157, 2020, 295-297
[BL09XU] X-ray pumping of the 229Th nuclear clock isomer. T Masuda et al., Nature volume 573, pages 238–242 (2019)
[BL10XU] New developments in high-pressure X-ray diffraction beamline for diamond anvil cell at SPring-8. N Hirao et al., Matter and Radiation at Extremes 5, 018403 (2020)
[BL10XU] Equation of State of Liquid Iron under Extreme Conditions. Y Kuwayama et al., Physical Review Letters 124, 165701 (2020)
[BL13XU] Ferroelastic domain motion by pulsed electric field in (111)/(111¯) rhombohedral epitaxial Pb(Zr0.65Ti0.35)O3 thin films: Fast switching and relaxation. Y Ehara, et al., Phys. Rev. B, 100, 10416 (2019)
[BL13XU and 15XU] Charge screening strategy for domain pattern control in nano-scale ferroelectric systems. T Yamada et al., Sci. Rep. 7, 5236 (2017)
[BL15XU] Time-resolved X-ray diffraction system for study of Pb(Zr, Ti)O3 films under a temporal electric field at BL15XU, SPring-8. O Seo et al., Rev. Sci. Instrum. 90, 093001 (2019)
[BL22XU] Development of an apparatus for Bragg coherent X-ray diffraction imaging, and its application to the three dimensional imaging of BaTiO3 nano-crystals. K Ohwada et al., Japanese Journal of Applied Physics 58, SLLA05 (2019) 58 SLLA05
[BL22XU] Improving Fatigue Performance of Laser-Welded 2024-T3 Aluminum Alloy Using Dry Laser Peening. T Sano et al., Metals, 9, 1192, 2019
[BL24XU]「樹脂射出成形品の板厚断面方向の結晶化度分布解析」舟本三恵 他, 兵庫県ビームライン年報・成果集 Vol. 5, 6, pp.33-36, 2017
[BL39XU]「X線屈折レンズとKBミラーによる二段階ナノ集光光学系の開発」鈴木基寛 他, SPring-8/SACLA 利用研究成果集 Vol. 8 No. 1
[BL41XU] Low-dose X-ray structure analysis of cytochrome c oxidase utilizing high-energy X-rays. G Ueno et al., J. Synchrotron Rad. (2019). 26, 912-921
[BL43LXU] X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern. MC Zdora et al., Phys. Rev. Lett. 118, 203903 (2017)