
High-precision microstructures made with X-ray and electroplating: LIGA
KIT/IMT and microworks GmbH are two of the world's top authorities in the fabrication of high aspect ratio polymer and metal structures using X-ray lithography and electroplating techniques. With these techniques, LIGA Process, for example X-ray gratings with both a narrow period and high aspect ratio and X-ray focusing lenses as well as micro gears in metal, and high aspect ratio apertures for optical applications have been realised.
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Precision grating structures |
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Synchrotron radiation source KARA at KIT |
LIGA process
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1. X-ray mask fabrication |
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2. X-ray lithography (Lithographie) |
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3. Electroplating (Galvanoformung) |
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4. Polymer moulding (Abformung) |
LIGA application examples
Microstructured polymer and metal parts made by the LIGA process in Karlsruhe have various applications for example in the X-ray optic fields, both in research institutes and industries.
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High contrast resolution targets for X-ray imaging |
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Gold coded aperture |
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X-ray gratings for Talbot interferometry |
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X-ray focusing Compound refractive lens, CRL |
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Multi through-holes (X-ray multi-collimator) |
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Micro through-hole (X-ray aperture) |
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Micro gears 1 |
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Micro gears 2 |
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High aspect ratio through-holes in nickel |
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X-ray test apertures |
X-ray optics and micro fabrication
[KIT/IMT and microworks GmbH]
Talbot-Lau interferometry kit, TALINT
Compound refractive lenses, CRL
Microfabrication process, LIGA
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